4

Dynamic relaxation oscillations in a nonlinearly driven quartz crystal

Year:
2015
Language:
english
File:
PDF, 813 KB
english, 2015
6

Particle filters integrated inside a silicon wafer

Year:
2005
Language:
english
File:
PDF, 188 KB
english, 2005
11

Stochastic switching of cantilever motion

Year:
2013
Language:
english
File:
PDF, 918 KB
english, 2013
13

Microcantilevers encapsulated in fluid wells for sensing in liquids

Year:
2012
Language:
english
File:
PDF, 861 KB
english, 2012
27

Nanomechanical gas sensing with nonlinear resonant cantilevers

Year:
2014
Language:
english
File:
PDF, 1.42 MB
english, 2014
30

Photolithography on bulk micromachined substrates

Year:
2009
Language:
english
File:
PDF, 726 KB
english, 2009